Eric Guo
Special Assistant to the President at National Silicon Industry Group
SPIE Involvement:
Author
Publications (27)

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Metrology, Visualization, Etching, Manufacturing, Photomasks, Semiconducting wafers, Data analysis

Proceedings Article | 5 October 2016 Paper
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Etching, Dry etching, Particles, Ions, Gases, Manufacturing, Oxygen, Photomasks, Plasma etching, Plasma

Proceedings Article | 5 October 2016 Paper
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Electron beams, Error analysis, Control systems, Photomasks, Integrated circuits, Semiconductor manufacturing, Lutetium, Critical dimension metrology, Neodymium, Tolerancing

Proceedings Article | 23 October 2015 Paper
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Opacity, Sensors, Etching, Metals, Glasses, Inspection, Chromium, Photomasks, Phase shifts, Defect inspection

Showing 5 of 27 publications
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