Dr. Eric Hendrickx
PhD at imec
SPIE Involvement:
Conference Program Committee | Author | Editor
Publications (109)

Proceedings Article | 12 May 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Nanoimprint lithography, Extreme ultraviolet lithography, Finite element methods, Optical lithography, Photomasks, Extreme ultraviolet, Stochastic processes, Inspection

Proceedings Article | 23 March 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Data modeling, Stochastic processes, Optical correlators, Calibration, Defect inspection, Metrology

Proceedings Article | 29 November 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Critical dimension metrology, Etching, Stochastic processes, Failure analysis, Optical correlators, Cadmium, Finite element methods, Inspection, Metrology, Defect detection

Proceedings Article | 26 September 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Source mask optimization, Nanoimprint lithography, SRAF, Optical proximity correction, Phase shifting, Logic

Proceedings Article | 26 September 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Diffraction, Extreme ultraviolet lithography, Metals, Photomasks, Semiconducting wafers, Nanoimprint lithography, Optical proximity correction, Extreme ultraviolet, Phase modulation, Phase shift keying

Showing 5 of 109 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 23 November 2018

Conference Committee Involvement (9)
Extreme Ultraviolet (EUV) Lithography XII
21 February 2021 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2020
20 September 2020 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Showing 5 of 9 Conference Committees
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