Dr. Eric Lanzendorf
Staff Engineer at Intel Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Optical lithography, Etching, Image processing, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Defect inspection

Proceedings Article | 25 September 1995
Proc. SPIE. 2547, Laser Techniques for Surface Science II
KEYWORDS: Polarization, Sensors, Chemical species, Molecules, Electrons, Ions, Platinum, Oxygen, Laser beam diagnostics, Photolysis

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