Dr. Eric Lanzendorf
Staff Engineer at Intel Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Photomasks, Extreme ultraviolet, Etching, Reflectivity, Defect inspection, Extreme ultraviolet lithography, Inspection, Ruthenium, Image processing, Optical lithography

Proceedings Article | 25 September 1995 Paper
Proc. SPIE. 2547, Laser Techniques for Surface Science II
KEYWORDS: Ions, Chemical species, Laser beam diagnostics, Molecules, Oxygen, Photolysis, Polarization, Electrons, Platinum, Sensors

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