Dr. Eric Louis
Senior Scientist at Univ. of Twente
SPIE Involvement:
Conference Program Committee | Author
Publications (40)

Proceedings Article | 26 October 2017
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: X-ray optics, X-rays, Adaptive optics, Geometrical optics, Alternate lighting of surfaces

Proceedings Article | 26 August 2015
Proc. SPIE. 9588, Advances in X-Ray/EUV Optics and Components X
KEYWORDS: Mirrors, X-ray optics, Optical lithography, X-rays, Interfaces, Nitrogen, Reflectivity, Extreme ultraviolet, Local area networks, Lanthanum

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Diffraction, Multilayers, Reflection, Imaging systems, Ultraviolet radiation, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma

Proceedings Article | 27 September 2013
Proc. SPIE. 8848, Advances in X-Ray/EUV Optics and Components VIII
KEYWORDS: Lithography, Mirrors, Multilayers, Sputter deposition, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Deposition processes, Local area networks, Lanthanum

Proceedings Article | 27 September 2013
Proc. SPIE. 8848, Advances in X-Ray/EUV Optics and Components VIII
KEYWORDS: Diffraction, Optical filters, Antireflective coatings, Multilayers, Reflection, Ultraviolet radiation, Silicon, Reflectivity, Extreme ultraviolet, Diffraction gratings

SPIE Journal Paper | 19 October 2012
JM3 Vol. 11 Issue 4
KEYWORDS: Reflectivity, Mirrors, Local area networks, Multilayers, Extreme ultraviolet lithography, Boron, Interfaces, Extreme ultraviolet, Lithography, Lanthanum

Showing 5 of 40 publications
Conference Committee Involvement (6)
Advances in X-Ray/EUV Optics and Components XIV
14 August 2019 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components XIII
20 August 2018 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components XII
8 August 2017 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components XI
31 August 2016 | San Diego, California, United States
Advances in X-Ray/EUV Optics and Components X
11 August 2015 | San Diego, California, United States
Showing 5 of 6 published special sections
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