Eric A. Mason
Optics Manager at Cymer LLC
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 16 November 2018
Proc. SPIE. 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
KEYWORDS: Statistical analysis, Photons, Crystals, Optical coatings, Excimer lasers, Thin film coatings, Fluorine, Surface finishing, Absorption

Proceedings Article | 21 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Semiconductors, Carbon, Light sources, Deep ultraviolet, Metals, Nitrogen, Helium, Neon, Semiconducting wafers

Proceedings Article | 20 June 2017
Proc. SPIE. 10147, Optical Microlithography XXX

Proceedings Article | 26 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Energy efficiency, Light sources, Optical lithography, Oscillators, Nitrogen, Manufacturing, Photoacoustic tomography, Helium, Molybdenum, Field emission displays

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Semiconductors, Lithography, Light sources, Optical amplifiers, Optical lithography, Switching, Scanners, Semiconducting wafers, Light, Near field optics

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top