Eric R. Miller
at IBM Thomas J. Watson Research Ctr.
SPIE Involvement:
Publications (11)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 1295305 (2024)
KEYWORDS: Line width roughness, Light sources and illumination, Nanoimprint lithography, Optical lithography, Line edge roughness, Etching, Transistors, Extreme ultraviolet, Reactive ion etching, Extreme ultraviolet lithography

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC120560A (2022)
KEYWORDS: Optical lithography, Etching, Plasma etching, Plasma, Nanotechnology, Extreme ultraviolet, Line width roughness, Ions, Fin field effect transistors, Extreme ultraviolet lithography

Proceedings Article | 26 February 2021 Presentation + Paper
Proceedings Volume 11615, 116150A (2021)
KEYWORDS: Etching, Critical dimension metrology, Optical lithography, Back end of line, Semiconducting wafers, Logic, Lithography, Dielectrics

Proceedings Article | 22 February 2021 Presentation
Tao Li, Stefan Schmitz, Phil Friddle, Samantha Tan, Wenbing Yang, Indira Seshadri
Proceedings Volume 11615, 116150E (2021)
KEYWORDS: Etching, Silicon, Ions, Chemistry, Control systems, Plasma, Optical lithography, Modulation, Manufacturing, Chlorine

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11609, 116090S (2021)

Showing 5 of 11 publications
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