Dr. Erik J. Nelson Profile

Dr. Erik J. Nelson

at LLNL

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 1 April 2006

Oxidation resistance and microstructure of ruthenium-capped extreme ultraviolet lithography multilayers

Sasa Bajt, Zu Rong Dai, Erik Nelson, Mark Wall, Jennifer Alameda, Nhan Nguyen, Sherry Baker, Jeffrey Robinson, John Taylor, Andrew Aquila, Nora Edwards

JM3, Vol. 5, Issue 02, 023004, (April 2006) https://doi.org/10.1117/12.10.1117/1.2201027

KEYWORDS: Ruthenium, Silicon, Molybdenum, Extreme ultraviolet lithography, Reflectivity, Electrons, Oxides, Resistance, Transmission electron microscopy, Oxidation

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Proceedings Article | 6 May 2005 Paper

Oxidation resistance of Ru-capped EUV multilayers

Sasa Bajt, Zu Rong Dai, Erik Nelson, Mark Wall, Jennifer Alameda, Nhan Nguyen, Sherry Baker, Jeffrey Robinson, John Taylor, Miles Clift, Andy Aquila, Eric Gullikson, N. V. Ginger Edwards

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.597443

KEYWORDS: Ruthenium, Reflectivity, Silicon, Multilayers, Oxides, Electron beams, Resistance, Molybdenum, Extreme ultraviolet lithography, Oxidation

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