Dr. Erik J. Nelson
at LLNL
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Ruthenium, Silicon, Molybdenum, Extreme ultraviolet lithography, Reflectivity, Electrons, Oxides, Resistance, Transmission electron microscopy, Oxidation

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Oxides, Multilayers, Electron beams, Silicon, Resistance, Reflectivity, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Oxidation

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