Three-dimensional (3D) InAs/GaAs quantum dots (QDs) island size and density evolution under different coverage
and temperature is studied by using our 3D kinetic Monte Carlo (KMC) model. Our KMC model is based on the
solid-on-solid one with bond counting and Ehrlich-Schwoebel barrier being incorporated. It is found that there is a QD
island size limit for the growth coverage. Below this limit existing QD islands can adsorb new-coming adatoms;
however, beyond the limit new QD islands will form and adopt new coming adatoms. It is also observed that with
increasing temperature, the QD islands size will be increased while their density will be reduced.