Prof. Ernst-Bernhard Kley
Workpackage Leader at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Author
Publications (114)

Proceedings Article | 20 November 2017
Proc. SPIE. 10565, International Conference on Space Optics — ICSO 2010
KEYWORDS: Diffraction gratings, Etching, Binary data, Modulation, Silica, Spectroscopy, Diffraction, Stray light, Charge-coupled devices, Chromium

Proceedings Article | 31 October 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, X-rays, Silica, Photomasks, X-ray lithography, Electron beam lithography, Optical design, Electron beams, Photoresist materials, Diffraction

Proceedings Article | 31 October 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Electron beam lithography, Antireflective coatings, Lithography, Near field, Photomasks, Interfaces, Reflectivity, Glasses, Diffraction, Stray light

Proceedings Article | 15 September 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Titanium dioxide, Polarizers, Far ultraviolet, Transmittance, Titanium, Refractive index, Polarization, Photomasks, Electron beam lithography, Diffraction

Proceedings Article | 15 September 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Silicon, Antireflective coatings, Mid-IR, Reactive ion etching, Interfaces, Etching, Transmittance, Coating, Optics manufacturing, Scattering

Showing 5 of 114 publications
Proceedings Volume Editor (5)

Conference Committee Involvement (21)
High Contrast Metastructures V
17 February 2016 | San Francisco, California, United States
High Contrast Metastructures IV
11 February 2015 | San Francisco, California, United States
High Contrast Metastructures III
4 February 2014 | San Francisco, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
3 February 2014 | San Francisco, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
5 February 2013 | San Francisco, California, United States
Showing 5 of 21 Conference Committees
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