Prof. Ernst-Bernhard Kley
Workpackage Leader at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Conference Program Committee | Conference Chair | Author
Publications (119)

PROCEEDINGS ARTICLE | November 20, 2017
Proc. SPIE. 10565, International Conference on Space Optics — ICSO 2010
KEYWORDS: Diffraction, Modulation, Silica, Etching, Spectroscopy, Chromium, Charge-coupled devices, Stray light, Binary data, Diffraction gratings

PROCEEDINGS ARTICLE | October 31, 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Optical design, Electron beams, Silica, X-rays, Photoresist materials, Photomasks, X-ray lithography

PROCEEDINGS ARTICLE | October 31, 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Antireflective coatings, Glasses, Interfaces, Reflectivity, Near field, Photomasks, Stray light

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Electron beam lithography, Diffraction, Refractive index, Titanium, Titanium dioxide, Polarization, Polarizers, Transmittance, Photomasks, Far ultraviolet

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Mid-IR, Antireflective coatings, Scattering, Etching, Interfaces, Silicon, Coating, Transmittance, Reactive ion etching, Optics manufacturing

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Optical components, Lithography, Electron beam lithography, Optical lithography, Polymers, Metals, Coating, Scanning electron microscopy, Photoresist materials, Photomasks, Aluminum, Double patterning technology, Nanolithography, Diffraction gratings

Showing 5 of 119 publications
Conference Committee Involvement (21)
High Contrast Metastructures V
17 February 2016 | San Francisco, California, United States
High Contrast Metastructures IV
11 February 2015 | San Francisco, California, United States
High Contrast Metastructures III
4 February 2014 | San Francisco, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
3 February 2014 | San Francisco, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
5 February 2013 | San Francisco, California, United States
Showing 5 of 21 published special sections
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