Prof. Erol C. Harvey
at Swinburne Univ of Technology
SPIE Involvement:
Conference Program Committee | Conference Chair | Symposium Chair | Author
Publications (56)

SPIE Journal Paper | July 1, 2007
JM3 Vol. 6 Issue 03
KEYWORDS: Silicon, Titanium, Gold, Metals, Copper, Chromium, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography, Chemical analysis

SPIE Journal Paper | January 1, 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Diffusion, Photomasks, X-rays, X-ray lithography, Lithography, Polymethylmethacrylate, Synchrotron radiation, Photoresist processing, Photoresist materials, Diffraction

SPIE Journal Paper | January 1, 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Acoustics, Diffusion, X-rays, Photomasks, X-ray lithography, Calibration, Temperature metrology, Resistance, Signal attenuation, Synchrotron radiation

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Actuators, Nanotechnology, Microfluidics, Biosensing, Biomedical optics, BioMEMS, Nickel, Sensing systems, Biological research, Thermal modeling

PROCEEDINGS ARTICLE | January 13, 2006
Proc. SPIE. 6039, Complex Systems
KEYWORDS: Data modeling, Sensors, Polymers, Metals, Composites, Resistance, Amplifiers, Phase transfer function, Resistors, Polymer thin films

PROCEEDINGS ARTICLE | December 21, 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Lithography, Diffraction, Polymethylmethacrylate, X-rays, Diffusion, Photoresist materials, Photomasks, Synchrotron radiation, Photoresist processing, X-ray lithography

Showing 5 of 56 publications
Conference Committee Involvement (10)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Smart Materials III
13 December 2004 | Sydney, Australia
Showing 5 of 10 published special sections
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