Dr. Esko I. Kauppinen
at Aalto Univ School of Science and Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 October 2021 Presentation + Paper
Jarkko Etula, Bjørn Mikladal, Mari Makkonen, Esko Kauppinen, Ilkka Varjos
Proceedings Volume 11854, 118540S (2021) https://doi.org/10.1117/12.2599072
KEYWORDS: Extreme ultraviolet lithography, Particle filters, Transparent conducting films, Extreme ultraviolet, Carbon nanotubes, Particles, X-rays, Metals, Coating, Transmission electron microscopy, Pellicles, Transmittance, EUV optics

SPIE Journal Paper | 1 November 2000
A. Jaaskelainen, Kai-Erik Peiponen, Jukka Raety, U. Tapper, O. Richard, E. Kauppinen, K. Lumme
OE, Vol. 39, Issue 11, (November 2000) https://doi.org/10.1117/12.10.1117/1.1313767
KEYWORDS: Refractive index, Particles, Spherical lenses, Water, Reflectivity, Reflectometry, Optical spheres, Liquids, Transmission electron microscopy, Prisms

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