Dr. Estefanía Abad
at Fundación TEKNIKER
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 15, 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Gas sensors, Optical lithography, Sensors, Copper, Resistance, Laser ablation, Antennas, Adhesives, Flexible circuits, Prototyping

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Femtosecond phenomena, Optical lithography, Sensors, Metals, Copper, Laser ablation, Photomasks, Wet etching, Adhesives, Assembly equipment

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Gold, Thin films, Lithography, Ferroelectric materials, Optical lithography, Etching, Microchannel plates, Photomasks, Wet etching, Reactive ion etching

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