Etienne Okada
at IEMN
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 March 2019
Proc. SPIE. 10906, Laser-based Micro- and Nanoprocessing XIII
KEYWORDS: Semiconductor materials, Silicon, Laser ablation, Etching, Switches, Micromachining, Laser processing, Profilometers, Femtosecond laser micromachining

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