Dr. Eugene Barash
Principal Scientist
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 August 1997
Proc. SPIE. 3183, Microlithographic Techniques in IC Fabrication
KEYWORDS: Optical lithography, Optical simulations, Photoresist materials, Lithography, Ultraviolet radiation, Spectroscopes, Wafer testing, Semiconducting wafers, Cadmium sulfide

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