Mr. Eugene Yu. Gavrilin
at Inst of Microelectronics Tech
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5401, Micro- and Nanoelectronics 2003
KEYWORDS: Semiconductors, Etching, Silicon, Photonic crystals, Optoelectronics, Microelectronics, Semiconducting wafers, Photonic crystal devices, Surface finishing, Electrochemical etching

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5401, Micro- and Nanoelectronics 2003
KEYWORDS: Statistical analysis, Etching, Silicon, Diffusion, Photonic crystals, Computer simulations, Semiconductor lasers, Scanning electron microscopy, Surface finishing, Isotropic etching

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