Mr. Eugene Yu. Gavrilin Profile

Eugene Yu. Gavrilin

at Inst of Microelectronics Tech

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 28 May 2004 Paper

Transition from quasi-hexagonal to quasi-one dimensional pores distribution during deep anodic etching of uniaxial stressed silicon plate

V. Starkov, Eugene Gavrilin, Anatoli Vyatkin, Vladimir Emel'yanov, K. Eremin

Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.557928

KEYWORDS: Etching, Silicon, Scanning electron microscopy, Diffusion, Statistical analysis, Isotropic etching, Computer simulations, Surface finishing, Semiconductor lasers, Photonic crystals

Read Abstract +

Proceedings Article | 28 May 2004 Paper

Investigation of a nucleation stage of macropore formation in p-type silicon

V. Starkov, Eugene Gavrilin, Anatoli Vyatkin

Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.557921

KEYWORDS: Etching, Silicon, Semiconducting wafers, Surface finishing, Optoelectronics, Microelectronics, Semiconductors, Electrochemical etching, Photonic crystal devices, Photonic crystals

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years