Dr. Eui-Kyoon Kim
Process Engineer at Spansion Inc
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | July 1, 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Polymers, Interfaces, Quartz, Adhesives, Etching, Liquids, Silicon, Lithography, Mechanics, Natural surfaces

PROCEEDINGS ARTICLE | March 27, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Thin films, Lithography, Safety, Etching, Capillaries, Silicon, Interferometry, Silicon films, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Silicon, Plasma etching, Nanoimprint lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Etching, Ultraviolet radiation, Molecules, Scanning electron microscopy, Monte Carlo methods, Finite element methods, Polymerization, Molecular interactions

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