Dr. Eun-sang Cho Profile

Dr. Eun-sang Cho

at Dongbu HiTek Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 March 2008 Paper

Study of shallow trench isolation dry etching process using oxide hard mask and KrF photo-resist in 90 nm stand-alone flash device

Eunsang Cho, Mingon Lee, Dongwon Shin, Sangil Hwang, Sangwook Ryu, Kanghyun Lee

Proceedings Volume 6923, 69233V (2008) https://doi.org/10.1117/12.773264

KEYWORDS: Etching, Silicon, Silica, Optical lithography, Dry etching, Light sources, Image processing, Chemical mechanical planarization, Chemistry, Scanning electron microscopy

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years