Eungman Lee
at Yonsei Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Plasmonics, Surface plasmon polaritons, Finite-difference time-domain method, Optical lithography, Visualization, Metals, 3D modeling, Photoresist materials, Aluminum

Proceedings Article | 21 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Microscopes, Light sources, Optical lithography, Metals, Near field, Solids, Objectives, Aluminum, Near field optics

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Finite-difference time-domain method, Optical lithography, Metals, Silver, Laser applications, Near field, Transmittance, Aluminum, Light wave propagation, Near field optics

Proceedings Article | 15 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Fringe analysis, Surface plasmons, Finite-difference time-domain method, Polymethylmethacrylate, Metals, Photoresist materials, Photomasks, Aluminum, Light wave propagation

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