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Eva Giannatou
at Institute for Language and Speech Processing ILSP Athena R.C.
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Publications (1)
Proceedings Article | 26 March 2019 Presentation + Paper
Deep learning nanometrology of line edge roughness
Proceedings Volume 10959, 1095920 (2019) https://doi.org/10.1117/12.2520941
KEYWORDS: Line edge roughness, Scanning electron microscopy, Denoising, Signal to noise ratio, Image processing, Data modeling, Image denoising, Edge detection, Interference (communication), Image filtering
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