Eva Giannatou
at Institute for Language and Speech Processing ILSP Athena R.C.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Signal to noise ratio, Edge detection, Data modeling, Image processing, Denoising, Interference (communication), Scanning electron microscopy, Image filtering, Image denoising, Line edge roughness

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