Mr. Evgeney E. Gusev Profile

Evgeney E. Gusev

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Publications (2)

Proceedings Article | 31 January 2022 Paper

Investigation of the influence of the parameters of the temporary bonding and thinning operations on the bending of silicon wafers

N. Djuzhev, M. Makhiboroda, E. Gusev, M. Fomichev, A. Dedkova, P. Ivanin

Proceedings Volume 12157, 1215712 (2022) https://doi.org/10.1117/12.2623584

KEYWORDS: Semiconducting wafers, Wafer bonding, Silicon, Packaging, Adhesives, Manufacturing, Glasses, Standards development, Lithography, Transistors

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Proceedings Article | 30 December 2016 Paper

Determination of mechanical stress in the silicon nitride films with a scanning electron microscope

N. Djuzhev, E. Gusev, A. Dedkova, N. Patiukov

Proceedings Volume 10224, 1022428 (2016) https://doi.org/10.1117/12.2250118

KEYWORDS: Scanning electron microscopy, Electron microscopes, Silicon, Silicon films, Microelectromechanical systems, Ion beams, Thin films, Semiconducting wafers, Etching, Wet etching

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