Mr. Evgeny A. Kelm Profile

Evgeny A. Kelm

at INME

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 30 December 2016 Paper

Non-destructive determination of thickness of the dielectric layers using EDX

S. Sokolov, E. Kelm, R. Milovanov, D. Abdullaev, L. Sidorov

Proceedings Volume 10224, 1022426 (2016) https://doi.org/10.1117/12.2265570

KEYWORDS: Nondestructive evaluation, Dielectrics, Thin films, Monte Carlo methods, X-rays, Electron beams, Silicon, Aluminum, Silica, Scanning electron microscopy

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Proceedings Article | 18 December 2014 Paper

Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits

G. Molodtsova, R. Milovanov, D. Zubov, E. Kelm

Proceedings Volume 9440, 94400M (2014) https://doi.org/10.1117/12.2181199

KEYWORDS: Fine needle aspiration, Failure analysis, Integrated circuits, Inspection, Scanning electron microscopy, 3D image processing, Nanotechnology, Microelectronics, Semiconductors, Nanoelectronics

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Proceedings Article | 18 December 2014 Paper

Electrochemical recovery of damaged bonding area during failure analysis of the modern integrated circuits

D. Zubov, E. Kelm, R. Milovanov, G. Molodtsova

Proceedings Volume 9440, 94400N (2014) https://doi.org/10.1117/12.2181191

KEYWORDS: Copper, Gold, Silver, Failure analysis, Integrated circuits, Image restoration, Scanning electron microscopy, Aluminum, Optical microscopes, Metals

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Proceedings Article | 8 January 2013 Paper

Determining the state of non-volatile memory cells with floating gate using scanning probe microscopy

D. Hanzii, E. Kelm, N. Luapunov, R. Milovanov, G. Molodcova, M. Yanul, D. Zubov

Proceedings Volume 8700, 87000V (2013) https://doi.org/10.1117/12.2017156

KEYWORDS: Silica, Polishing, Transistors, Scanning probe microscopy, Metals, Amplifiers, Surface finishing, Wet etching, Sensors, Silicon

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