Evgeny Orekhov
at IPPM RAS
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 8, 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Silicon, Resistance, Doping, Silicon films, Transistors, Field effect transistors, Molybdenum, TCAD, Thermal modeling, Device simulation

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