Dr. Evgeny N. Zhikharev
at Physics and Technology Institute
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Nanostructures, Electron beams, Polymethylmethacrylate, Etching, Polymers, Diffusion, Surface roughness, Image acquisition, Scanning electron microscopy, Photoresist processing

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Nanostructures, Electron beams, Sensors, Etching, Silicon, Electron microscopes, Atomic force microscopy, Scanning electron microscopy, Photomasks, Integrated circuits

PROCEEDINGS ARTICLE | April 29, 2008
Proc. SPIE. 7025, Micro- and Nanoelectronics 2007
KEYWORDS: Electron beams, Silica, Etching, Image processing, Copper, Ions, Silicon, Diffusion, Image acquisition, Photomasks

PROCEEDINGS ARTICLE | June 10, 2006
Proc. SPIE. 6260, Micro- and Nanoelectronics 2005
KEYWORDS: Electron beams, Polymethylmethacrylate, Polymers, Dielectrics, Silicon, Macromolecules, Mercury, Solids, Polymerization, Polymer thin films

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5401, Micro- and Nanoelectronics 2003
KEYWORDS: Carbon, Nanostructures, Electron beams, Iron, Switching, Metals, Gases, Resistance, Magnetism, Nanocomposites

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