Dr. Ezequiel Vidal-Russell
Distinguished Member / Technical Staff at Micron Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Reticles, Metrology, Data modeling, Manufacturing, Feature extraction, Scanning electron microscopy, Dysprosium, Optical proximity correction, Semiconducting wafers, Data analysis

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Optical lithography, Data modeling, Calibration, Etching, Signal processing, Photomasks, Optical proximity correction, Photoresist processing, Semiconducting wafers, Process modeling

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