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Ezgi Aygun
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Publications (1)
Proceedings Article | 8 March 2019 Presentation
Development of electron-selective SiO2/TiO2 stack layers with superior surface passivation capacity for n-type silicon substrates (Conference Presentation)
Proceedings Volume 10919, 1091928 (2019) https://doi.org/10.1117/12.2510433
KEYWORDS: Silicon, Atomic layer deposition, Titanium dioxide, Semiconducting wafers, Wafer-level optics, Diodes, Temperature metrology, Chemical analysis, Spectroscopic ellipsometry, Heterojunctions
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