Dr. Fabian Lofink
at Fraunhofer Institute for Silicon Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 March 2019
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Ferroelectric materials, Electrodes, Finite element methods, Deep reactive ion etching, Molybdenum, Semiconducting wafers, Wafer bonding

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