Mr. Fabian Zimmer Profile

Fabian Zimmer

at Fraunhofer-Institut für Photonische Mikrosysteme

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 19 May 2009 Paper

Aluminium nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications

Holger Conrad, Jan Uwe Schmidt, Wolfram Pufe, Fabian Zimmer, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 7362, 73620J (2009) https://doi.org/10.1117/12.821715

KEYWORDS: Aluminum nitride, Silicon, Semiconducting wafers, Thin films, Sputter deposition, Finite element methods, X-ray diffraction, Microopto electromechanical systems, Crystals, Diffraction

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Proceedings Article | 19 February 2009 Paper

Fabrication of large-scale monocrystalline silicon micro-mirror arrays using adhesive wafer transfer bonding

Fabian Zimmer, Frank Niklaus, Martin Lapisa, Thomas Ludewig, Martin Bring, Martin Friedrichs, Thor Bakke, Harald Schenk, Wouter van der Wijngaart

Proceedings Volume 7208, 720807 (2009) https://doi.org/10.1117/12.808694

KEYWORDS: Silicon, Semiconducting wafers, Mirrors, Micromirrors, Wafer bonding, Adhesives, Oxides, Etching, Electrodes, Metals

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SPIE Journal Paper | 1 April 2008

Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers

Fabian Zimmer, Andreas Heberer, Heinrich Grueger, Harald Schenk

JM3, Vol. 7, Issue 02, 021005, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911035

KEYWORDS: Spectroscopy, Silicon, Etching, Near infrared, Diffraction gratings, Diodes, Semiconducting wafers, Signal processing, Mirrors, Monochromators

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Proceedings Article | 8 February 2008 Paper

Pushbroom NIR hyperspectral imager using MOEMS scanning grating chips

Heinrich Grüger, Thomas Egloff, Michael Scholles, Fabian Zimmer, Michael Müller, Harald Schenk

Proceedings Volume 6887, 68870E (2008) https://doi.org/10.1117/12.762904

KEYWORDS: Hyperspectral imaging, Near infrared, Imaging systems, Spectroscopy, Mirrors, Diffraction gratings, Microopto electromechanical systems, Detector arrays, Collimators, Imaging spectroscopy

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Proceedings Article | 2 October 2007 Paper

NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array

Thomas Egloff, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Michael Scholles, Hubert Lakner

Proceedings Volume 6765, 67650I (2007) https://doi.org/10.1117/12.734016

KEYWORDS: Hyperspectral imaging, Near infrared, Spectroscopy, Detector arrays, Mirrors, Imaging systems, Diffraction gratings, Microopto electromechanical systems, Imaging spectroscopy, Collimators

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Proceedings Article | 22 January 2007 Paper

Investigation and characterization of high-efficient NIR-scanning gratings used in NIR micro-spectrometer

F. Zimmer, A. Heberer, Th. Sandner, H. Grueger, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6466, 646605 (2007) https://doi.org/10.1117/12.701821

KEYWORDS: Mirrors, Spectroscopy, Etching, Diffraction gratings, Diodes, Silicon, Control systems, Oxides, Scanning electron microscopy, Signal processing

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Proceedings Article | 23 January 2006 Paper

Development of high-efficient NIR-scanning gratings for spectroscopic applications

F. Zimmer, H. Grueger, A. Heberer, Th. Sandner, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6114, 611407 (2006) https://doi.org/10.1117/12.644481

KEYWORDS: Mirrors, Etching, Silicon, Diffraction gratings, Spectroscopy, Micromirrors, Anisotropic etching, Wet etching, Aluminum, Diffraction

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Proceedings Article | 8 November 2005 Paper

New MOEMS based systems appropriate for spectroscopic investigations on agricultural growth and perishable food conditions

Heinrich Grueger, Harald Schenk, Andreas Heberer, Fabian Zimmer, Werner Scherff, Andreas Kenda, Albert Frank

Proceedings Volume 5996, 599610 (2005) https://doi.org/10.1117/12.630143

KEYWORDS: Spectrometers, Microopto electromechanical systems, Mirrors, Signal processing, Digital signal processing, Agriculture, Sensors, Silicon, Spectroscopy, Optical components

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Proceedings Article | 15 October 2005 Paper

Signal processing for a single detector MOEMS based NIR micro spectrometer

Andreas Heberer, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Andreas Kenda, Albert Frank, Werner Scherf

Proceedings Volume 5964, 59640I (2005) https://doi.org/10.1117/12.624990

KEYWORDS: Sensors, Signal processing, Mirrors, Near infrared, Spectroscopy, Digital signal processing, Microopto electromechanical systems, Infrared sensors, Light emitting diodes, LED displays

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Proceedings Article | 13 September 2005 Paper

Miniaturized MOEMS spectrometer for NIR applications

Heinrich Grueger, Andreas Heberer, Fabian Zimmer, Alexander Wolter, Harald Schenk

Proceedings Volume 5877, 58770J (2005) https://doi.org/10.1117/12.614750

KEYWORDS: Spectroscopy, Sensors, Mirrors, Signal processing, Silicon, Digital signal processing, Microopto electromechanical systems, Near infrared, Indium gallium arsenide, Infrared radiation

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Proceedings Article | 1 August 2005 Paper

Scanning micro-mirrors: from bar-code scanning to spectroscopy

F. Zimmer, H. Grueger, A. Heberer, T. Sandner, A. Wolter, H. Schenk

Proceedings Volume 5873, (2005) https://doi.org/10.1117/12.614895

KEYWORDS: Mirrors, Micromirrors, Silicon, Aluminum, Spectroscopy, Reflectivity, Oxides, Etching, Diffraction, Diffraction gratings

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Proceedings Article | 16 August 2004 Paper

Development of a NIR microspectrometer based on a MOEMS scanning grating

Fabian Zimmer, Heinrich Grueger, Andreas Heberer, Alexander Wolter, Harald Schenk

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544638

KEYWORDS: Spectroscopy, Mirrors, Diodes, Near infrared, Digital signal processing, Microopto electromechanical systems, Diffraction gratings, Light emitting diodes, Data processing, Signal processing

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Showing 5 of 12 publications

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