Mr. Fabian Zimmer
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Thin films, Diffraction, Sputter deposition, Crystals, X-ray diffraction, Silicon, Microopto electromechanical systems, Finite element methods, Aluminum nitride, Semiconducting wafers

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Oxides, Mirrors, Etching, Electrodes, Metals, Silicon, Micromirrors, Semiconducting wafers, Adhesives, Wafer bonding

SPIE Journal Paper | April 1, 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Spectroscopy, Silicon, Etching, Near infrared, Diffraction gratings, Diodes, Semiconducting wafers, Signal processing, Mirrors, Monochromators

PROCEEDINGS ARTICLE | February 8, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Hyperspectral imaging, Near infrared, Mirrors, Imaging systems, Spectroscopy, Imaging spectroscopy, Detector arrays, Collimators, Microopto electromechanical systems, Diffraction gratings

PROCEEDINGS ARTICLE | October 2, 2007
Proc. SPIE. 6765, Next-Generation Spectroscopic Technologies
KEYWORDS: Hyperspectral imaging, Near infrared, Mirrors, Imaging systems, Spectroscopy, Imaging spectroscopy, Detector arrays, Collimators, Microopto electromechanical systems, Diffraction gratings

PROCEEDINGS ARTICLE | January 22, 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Oxides, Mirrors, Etching, Spectroscopy, Silicon, Control systems, Scanning electron microscopy, Signal processing, Diodes, Diffraction gratings

Showing 5 of 12 publications
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