Dr. Fabio Ferri
Senior Process & Equipment Engineer at LFoundry Avezzano s.r.l.
SPIE Involvement:
Author
Area of Expertise:
Lithography Process
Publications (1)

PROCEEDINGS ARTICLE | March 20, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: CMOS sensors, Transparency, Optical lithography, Diffusion, Scanning electron microscopy, Photoresist materials, Image sensors, Charge-coupled devices, Photoresist processing, Semiconducting wafers

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