Dr. Faegheh Hasibi Profile

Dr. Faegheh Hasibi

at ASML Netherlands BV

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 March 2019 Paper

Leon van Dijk, Faegheh Hasibi, Maialen Larrañaga, Anne Pastol, Auguste Lam, Richard van Haren

Proceedings Volume 10959, 109591H (2019) https://doi.org/10.1117/12.2515185

KEYWORDS: Overlay metrology, Scanners, Semiconducting wafers, Metrology, Machine learning, Neural networks

Proceedings Article | 19 September 2018 Paper

Faegheh Hasibi, Leon van Dijk, Maialen Larrañaga, Anne Pastol, Auguste Lam, Richard van Haren

Proceedings Volume 10775, 107750X (2018) https://doi.org/10.1117/12.2500239

KEYWORDS: Overlay metrology, Semiconducting wafers, Machine learning, Scanners, Neural networks, Data modeling, Metrology, Performance modeling

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Keywords/Phrases