Dr. Fan Wang
at Shanghai Micro Electronics Equipment Co Ltd
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 14 July 2015
Proc. SPIE. 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers
KEYWORDS: Annealing, Silicon, Laser applications, Semiconductor lasers, Field effect transistors, Semiconducting wafers, Pulsed laser operation, Temperature metrology, Laser systems engineering, Absorption

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Microscopes, Optical filters, Metrology, Polarization, Spectroscopy, Optical testing, CCD cameras, Colorimetry, Scatterometry, Critical dimension metrology

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Diffraction, Spectroscopy, Scatterometry, Reflectometry, Time metrology, Reflectance spectroscopy, Semiconducting wafers, Scatter measurement, Overlay metrology, Diffraction gratings

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Target detection, Lithography, Sensors, Spatial light modulators, Scatterometry, Monte Carlo methods, Image sensors, Signal processing, Process control, Critical dimension metrology

Proceedings Article | 20 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Monochromatic aberrations, Metrology, Error analysis, Distortion, Image sensors, Source mask optimization, Semiconducting wafers, Prototyping, Overlay metrology

Showing 5 of 10 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top