Dr. Fan Yang
at Institute of Optics and Electronics
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 6 February 2019
Proc. SPIE. 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
KEYWORDS: Modulation, Lithography, Phase shift keying, Optics manufacturing, Laser applications, Wavefronts, Etching, Electron beam lithography, Laser development, Polarization

Proceedings Article | 30 January 2019
Proc. SPIE. 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics
KEYWORDS: 3D image processing, 3D metrology, Image processing, Optical testing, Imaging systems, Sensors, Cameras, 3D acquisition, Digital image processing, Calibration

Proceedings Article | 25 October 2016
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Lithography, Control systems, Semiconducting wafers, Clocks, Photomasks, Process control, Stepper motor drivers, Data communications, Telecommunications, Camera shutters

Proceedings Article | 9 June 2006
Proc. SPIE. 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Mirrors, Dielectric polarization, Laser optics, Polarization, Optical coatings, Thin films, Optical design, Point spread functions, Laser systems engineering, Reflection

Proceedings Article | 8 June 2006
Proc. SPIE. 6018, 5th International Workshop on Adaptive Optics for Industry and Medicine

Showing 5 of 6 publications
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