Dr. Frank Chen
at Photronics DNP Semiconductor Mask Corp
SPIE Involvement:
Conference Chair | Symposium Chair | Conference Program Committee | Author
Publications (22)

SPIE Journal Paper | May 1, 2007
OE Vol. 46 Issue 05

PROCEEDINGS ARTICLE | March 7, 2006
Proc. SPIE. 4101, Laser Interferometry X: Techniques and Analysis
KEYWORDS: Fabrication, Mirrors, Fringe analysis, Holograms, Holography, Aluminum, Holographic interferometry, Laser imaging, Assembly equipment, Prototyping

SPIE Journal Paper | May 1, 2003
OE Vol. 42 Issue 05
KEYWORDS: Pulsed laser operation, Fringe analysis, Holographic interferometry, Laser interferometry, Speckle pattern, Optical engineering, Laser metrology, Laser applications, Interferometry, High speed cameras


PROCEEDINGS ARTICLE | August 1, 2002
Proc. SPIE. 4754, Photomask and Next-Generation Lithography Mask Technology IX
KEYWORDS: Reticles, Metrology, Manufacturing, Inspection, Chromium, Optical resolution, Photomasks, Optical proximity correction, Mask making, Defect inspection

PROCEEDINGS ARTICLE | June 19, 2002
Proc. SPIE. 4778, Interferometry XI: Applications
KEYWORDS: Human-machine interfaces, Mirrors, Fringe analysis, Holograms, Holography, Composites, Interferometry, Speckle pattern, Head, Holographic interferometry

Showing 5 of 22 publications
Conference Committee Involvement (3)
Optical Measurement and Nondestructive Testing: Techniques and Applications
8 November 2000 | Beijing, China
Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments
8 November 2000 | Beijing, China
Laser Interferometry X: Applications
2 August 2000 | San Diego, CA, United States
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