Dr. Fang Zhang
at Shanghai Institute of Optics & Fine Mechanics,CAS
SPIE Involvement:
Author
Publications (13)

SPIE Journal Paper | 9 September 2020
JM3 Vol. 19 Issue 03

SPIE Journal Paper | 18 March 2020
OE Vol. 59 Issue 03
KEYWORDS: Semiconducting wafers, Optical lithography, Lithography, Photoresist materials, Optical engineering, Photomasks, Fiber optic illuminators, Sensors, Lithographic illumination, Overlay metrology

Proceedings Article | 24 July 2018 Paper
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Optical design, Optical lithography, Homogenization, Fourier transforms, Lens design, Micromirrors, Optical simulations, Source mask optimization, Device simulation, Resolution enhancement technologies

Proceedings Article | 24 July 2018 Paper
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Reticles, Optical lithography, Lithographic illumination, Sensors, Error analysis, Light scattering, Fourier transforms, Micromirrors, Immersion lithography, Source mask optimization

Proceedings Article | 24 July 2018 Paper
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Optical components, Refractive index, Modulation, Polarization, Birefringence, Quartz, Crystals, Wave plates, Optical resolution

Showing 5 of 13 publications
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