Farvardin Jahansooz
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Thin films, Lithography, Optical lithography, Deep ultraviolet, Signal attenuation, Glasses, Ultraviolet radiation, Computer generated holography, Photomasks, Photomask technology

PROCEEDINGS ARTICLE | July 7, 1997
Proc. SPIE. 3051, Optical Microlithography X
KEYWORDS: Etching, Control systems, Distortion, Scanning electron microscopy, Photomasks, Optical proximity correction, Semiconducting wafers, Statistical modeling

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