Mr. Farvardin Jahansooz Profile

Farvardin Jahansooz

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Publications (2)

Proceedings Article | 17 December 2003 Paper

Continuous-tone gray-scale photomasks based on photosensitive spin-on-glass technology for deep-UV lithography applications

Edgar Mendoza, F. Sigoli, H. Paulus, L. Giang, M. Seifouri, E. Lam, Lothar Kempen, Farvardin Johansooz

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.528092

KEYWORDS: Photomasks, Photomask technology, Deep ultraviolet, Lithography, Ultraviolet radiation, Computer generated holography, Signal attenuation, Glasses, Thin films, Optical lithography

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Proceedings Article | 7 July 1997 Paper

Experimental results on optical proximity correction with variable-threshold resist model

Nicolas Cobb, Avideh Zakhor, Mehran Reihani, Farvardin Jahansooz, Vijaya Raghavan

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.275977

KEYWORDS: Optical proximity correction, Photomasks, Statistical modeling, Semiconducting wafers, Control systems, Distortion, Etching, Scanning electron microscopy

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