Dr. Farzin Mirzaagha
Applications Development Manager at KLA Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Reticles, Logic, Defect detection, Data modeling, Databases, Inspection, 3D modeling, Image transmission, Optical proximity correction, SRAF

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Reticles, Visualization, Metals, Inspection, Image transmission, Wafer inspection, Photomasks, Semiconducting wafers, Defect inspection

Proceedings Article | 4 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Defect detection, Deep ultraviolet, Sensors, Crystals, Inspection, Detector development, Photomasks, Semiconducting wafers, Defect inspection

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