Dr. Fatima Anis
Research Scientist at KLA Tencor Corp
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | March 16, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Lithography, Visualization, Scanners, Manufacturing, Diagnostics, Process control, Semiconducting wafers, Yield improvement, Overlay metrology

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Metrology, Optical lithography, Principal component analysis, Seaborgium, Manufacturing, Inspection, Control systems, Process control, Semiconductor manufacturing, Optical alignment, Semiconducting wafers, Tolerancing, Overlay metrology

PROCEEDINGS ARTICLE | March 17, 2015
Proc. SPIE. 9419, Medical Imaging 2015: Ultrasonic Imaging and Tomography
KEYWORDS: Breast, Ultrasonography, Computer programming, Data acquisition, Transducers, Computed tomography, Reconstruction algorithms, Spatial resolution, Acoustics, Stochastic processes

PROCEEDINGS ARTICLE | March 11, 2015
Proc. SPIE. 9323, Photons Plus Ultrasound: Imaging and Sensing 2015
KEYWORDS: Imaging systems, Ultrasonography, Tomography, Transducers, Kidney, Reconstruction algorithms, Acoustics, 3D image processing, Laser systems engineering, Absorption

PROCEEDINGS ARTICLE | March 11, 2015
Proc. SPIE. 9323, Photons Plus Ultrasound: Imaging and Sensing 2015
KEYWORDS: Imaging systems, Image restoration, 3D modeling, Image analysis, Tomography, Image quality, Transducers, Reconstruction algorithms, Algorithm development, 3D image processing

PROCEEDINGS ARTICLE | March 3, 2014
Proc. SPIE. 8943, Photons Plus Ultrasound: Imaging and Sensing 2014
KEYWORDS: Biomedical optics, CT reconstruction, Imaging systems, Ultrasonography, Image restoration, Tomography, Transducers, Computed tomography, Reconstruction algorithms, Breast imaging

Showing 5 of 9 publications
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