In this paper, we propose a solution for simple, fast and easily controllable way of tuning silicon gratings using Micro
Electro Mechanical Systems (MEMS) to deform the grating itself. Basically the idea is to deform mechanically a silicon
grating using electrostatic actuators, enabling pitch tuning over a large proportion (more than 50% is easily achievable
with our approach). Moreover we can change the spacing of individual layers within the grating. A theoretical analysis
and numerical simulations are presented and a first prototype is fabricated. Bragg gratings, springs and actuators are
realized by silicon micro/nano machining on a silicon platform enabling full integration and passive alignment of all
optical components. Applications range from ultra-sensitive displacement sensors, to telecommunications and biology.