Dr. Fazhi Song Profile

Dr. Fazhi Song

at Harbin Institute of Technology

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Publications (2)

Proceedings Article | 20 August 2015 Presentation + Paper

Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage

Fazhi Song, Yan Wang, Xinglin Chen, Ping He

Proceedings Volume 9556, 95560P (2015) https://doi.org/10.1117/12.2186912

KEYWORDS: Particle swarm optimization, Particles, Systems modeling, Control systems, Lithography, Simulink, Servomechanisms, Optimization (mathematics), Device simulation, Superposition

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Proceedings Article | 6 March 2015 Paper

Communication design for multi-boards based on VME bus

Yang Liu, Fazhi Song, Kai Wei, Zhenxian Fu

Proceedings Volume 9446, 94464O (2015) https://doi.org/10.1117/12.2182254

KEYWORDS: Motion controllers, Data acquisition boards, Control systems, Field programmable gate arrays, Data acquisition, Lithography, Control systems design, Connectors, Human-machine interfaces, Clocks

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