Federico Medini
at Technische Univ Eindhoven
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 1249631 (2023) https://doi.org/10.1117/12.2658259
KEYWORDS: Plasma, Particles, Electric fields, Simulations, Particle contamination, Contamination control, Contamination, Switching, Electrodes, Vacuum

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