Fedor Sidorov
at Institute of Physical Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Dielectrics, Interfaces, Silicon, Capacitance, Transistors, Molybdenum, Hafnium, Hybrid fiber optics, Praseodymium

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