Dr. Fedor Trintchouk
Principal Scientist at Singular Genomics Systems
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Light sources, Deep ultraviolet, Modulation, Polarization, Scanners, Laser stabilization, Double patterning technology, Immersion lithography, High volume manufacturing

SPIE Journal Paper | 1 July 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Critical dimension metrology, Optical simulations, Laser scanners, 3D scanning, Laser stabilization, Scanners, Convolution, Semiconducting wafers, Laser metrology, Laser damage threshold

Proceedings Article | 17 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Light sources, Scanners, Control systems, Laser scanners, Excimer lasers, Double patterning technology, Immersion lithography, 3D scanning, Semiconducting wafers, Pulsed laser operation

Proceedings Article | 15 March 2006 Paper
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Actuators, Light sources, Metrology, Deep ultraviolet, Imaging systems, Control systems, Laser stabilization, Optical proximity correction, Molybdenum, Fluorine

Proceedings Article | 15 March 2006 Paper
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Light sources, Metrology, Polarization, Scanners, Spectroscopy, Manufacturing, Control systems, Immersion lithography, Acoustics, Pulsed laser operation

Showing 5 of 7 publications
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