Dr. Fei Jia
Project Manager at ASML Netherlands BV
SPIE Involvement:
Publications (4)

Proceedings Article | 20 March 2020 Paper
Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng
Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899
KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

Proceedings Article | 18 March 2019 Presentation
Proceedings Volume 10961, 109610J (2019) https://doi.org/10.1117/12.2515725
KEYWORDS: Critical dimension metrology, Light sources, Semiconducting wafers, Yield improvement, Deep ultraviolet, Scanners, Control systems, Source mask optimization

Proceedings Article | 30 September 2013 Paper
F. Jia, F. Staub, J. Balmer
Proceedings Volume 8849, 884903 (2013) https://doi.org/10.1117/12.2023283
KEYWORDS: Picosecond phenomena, Samarium, Barium, X-ray lasers, Pulsed laser operation, Laser systems engineering, Lanthanum, Beam splitters, X-rays, Applied physics

Proceedings Article | 30 January 2012 Paper
Sören Richter, Fei Jia, Matthias Heinrich, Sven Döring, Stefan Nolte, Andreas Tünnermann
Proceedings Volume 8247, 82470N (2012) https://doi.org/10.1117/12.908500
KEYWORDS: Silica, Absorption, Excitons, Picosecond phenomena, Femtosecond phenomena, Polarization, Pulsed laser operation, Scanning electron microscopy, Plasma, Nanostructures

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