Dr. Fei Jia Profile

Dr. Fei Jia

Project Manager at ASML Netherlands BV

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Publications (4)

Proceedings Article | 20 March 2020 Paper

Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility

Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng

Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899

KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

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Proceedings Article | 18 March 2019 Presentation

Quantifying global and local CD variation for an advanced 3D NAND layer (Conference Presentation)

Will Conley, Yaobin Feng, Zhiyang Song, Moran Guo, Jun He, Longxia Guo, Gang Xu, Simon Hsieh, James Bonafede, Stephen Hsu, Austin Peng, Jun Wei Lu, Victor Peng, Beeri Nativ, Fei Jia, Herman Nicolai, Ijen van Mil

Proceedings Volume 10961, 109610J (2019) https://doi.org/10.1117/12.2515725

KEYWORDS: Critical dimension metrology, Light sources, Semiconducting wafers, Yield improvement, Deep ultraviolet, Scanners, Control systems, Source mask optimization

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Proceedings Article | 30 September 2013 Paper

Sub-10-nm Ni-like soft-x-ray lasers

F. Jia, F. Staub, J. Balmer

Proceedings Volume 8849, 884903 (2013) https://doi.org/10.1117/12.2023283

KEYWORDS: Picosecond phenomena, Samarium, Barium, X-ray lasers, Pulsed laser operation, Laser systems engineering, Lanthanum, Beam splitters, X-rays, Applied physics

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Proceedings Article | 30 January 2012 Paper

Enhanced formation of nanogratings inside fused silica due to the generation of self-trapped excitons induced by femtosecond laser pulses

Sören Richter, Fei Jia, Matthias Heinrich, Sven Döring, Stefan Nolte, Andreas Tünnermann

Proceedings Volume 8247, 82470N (2012) https://doi.org/10.1117/12.908500

KEYWORDS: Silica, Absorption, Excitons, Picosecond phenomena, Femtosecond phenomena, Polarization, Pulsed laser operation, Scanning electron microscopy, Plasma, Nanostructures

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