Fei Liu received his Ph.D. from University of California-Davis in 2013. His PhD research is on design and development of 100MW peak power TEA CO2 lasers. Afterwards he joined ASML research department working on feasibility study of alternative architecture of Laser Produced Plasma (LPP) EUV source. His current research interest is high-NA EUV machine integral system performance optimization. He received Richard Snavely Memorial Award in 2009.