Dr. Feixiang Luo Profile

Dr. Feixiang Luo

Senior Engineer at GLOBALFOUNDRIES Inc

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Publications (2)

Proceedings Article | 19 March 2018 Presentation + Paper

Holistic analysis of aberration induced overlay error in EUV lithography

Yulu Chen, Lars Liebmann, Lei Sun, Allen Gabor, Shuo Zhao, Feixiang Luo, Obert Wood, Xuemei Chen, Daniel Schmidt, Michael Kling, Francis Goodwin

Proceedings Volume 10583, 105830D (2018) https://doi.org/10.1117/12.2297027

KEYWORDS: Aberration theory, Zernike polynomials, Diffraction, Extreme ultraviolet lithography, Wavefronts, Error analysis, Scanners, Photomasks, Overlay metrology, Lithography

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Proceedings Article | 21 March 2016 Paper

Helium ion beam lithography (HIBL) using HafSOx as the resist

Feixiang Luo, Viacheslav Manichev, Mengjun Li, Gavin Mitchson, Boris Yakshinskiy, Torgny Gustafsson, David Johnson, Eric Garfunkel

Proceedings Volume 9779, 977928 (2016) https://doi.org/10.1117/12.2219239

KEYWORDS: Ions, Helium, Electrons, Electron beam lithography, Line edge roughness, Monte Carlo methods, Ion beam lithography, Extreme ultraviolet lithography, Silicon, Scanning helium ion microscopy

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