CONFERENCE PROCEEDINGS
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Felix Gerhard Balzer
at Hexagon Metrology PTS
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Publications (3)
Proceedings Article | 26 March 2013 Paper
0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography
Nataliya Vorbringer-Doroshovets, Felix Balzer, Roland Fuessl, Eberhard Manske, Marcus Kaestner, Andreas Schuh, Jens-Peter Zoellner, Manuel Hofer, Elshad Guliyev, Ahmad Ahmad, Tzvetan Ivanov , Ivo Rangelow
Proceedings Volume 8680, 868018 (2013) https://doi.org/10.1117/12.2012324
KEYWORDS: Scanning probe lithography, Lithography, Atomic force microscopy, Nanoelectronics, Optical lithography, Silicon, Inspection, Scanners, Optical alignment, Photomasks
Proceedings Article | 25 August 2010 Paper
Investigation of the metrological properties of a 3-D microprobe with optical detection system
Proceedings Volume 7767, 77670V (2010) https://doi.org/10.1117/12.863118
KEYWORDS: Interferometers, Metrology, Optical spheres, Head, Silicon, 3D metrology, Sensors, Beam splitters, Interferometry, Optical components
Proceedings Article | 17 June 2009 Paper
The complete acquisition of the topography of a special multi-mirror arrangement with the help of a Fizeau interferometer
H. Xu, A. Müller, F. Balzer, B. Percle, E. Manske, G. Jäger
Proceedings Volume 7389, 73890O (2009) https://doi.org/10.1117/12.823484
KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, Environmental sensing, Body temperature, Calibration, Wavefronts, Turbulence, Temperature metrology
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