Felix Gerhard Balzer
at Hexagon Metrology PTS
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Optical lithography, Scanners, Silicon, Inspection, Scanning probe lithography, Atomic force microscopy, Photomasks, Optical alignment, Nanoelectronics

PROCEEDINGS ARTICLE | August 25, 2010
Proc. SPIE. 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
KEYWORDS: Optical components, Beam splitters, Metrology, Optical spheres, Interferometers, Sensors, Silicon, Interferometry, Head, 3D metrology

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Mirrors, Interferometers, Calibration, Interferometry, Wavefronts, Turbulence, Body temperature, Environmental sensing, Temperature metrology, Fizeau interferometers

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