Dr. Felix Holzner
CEO at SwissLitho AG
SPIE Involvement:
Author
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Publications (4)

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Holograms, Etching, Polymers, Silicon, Scanning probe lithography, Atomic force microscopy, Nanoimprint lithography, Reactive ion etching, Photoresist processing

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Thin films, Lithography, Optical lithography, Silica, Etching, Polymers, Molecules, Crystals, Silicon, Resistance, Scanning probe lithography, Photoresist materials, Physical vapor deposition

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Optical lithography, Polymers, Molecules, Silicon, Image resolution, Scanning probe lithography, Scanning electron microscopy, Photomasks, Nanolithography

Proceedings Article | 1 October 2013 Paper
Proc. SPIE. 8886, 29th European Mask and Lithography Conference
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Polymers, Silicon, Scanning probe lithography, Scanning electron microscopy, Photomasks, Reactive ion etching, Nanolithography

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