Fen-Shuo Chen
Plant Manager at Toppan Chunghwa Electronics Co Ltd
SPIE Involvement:
Publications (7)

Proceedings Article | 11 May 2009 Paper
Casper Lee, Jason Lin, Frank Chen
Proceedings Volume 7379, 73790X (2009) https://doi.org/10.1117/12.824274
KEYWORDS: Error analysis, Photomasks, Databases, Inspection, Current controlled current source, Semiconducting wafers, Cesium, Lithium, Mask making

Proceedings Article | 11 May 2007 Paper
Joseph Gordon, David Chan, Larry Frisa, Colleen Weins, Christian Chovino, John Keagy, Steve Mahoney, Frank Chen, Makoto Kozuma, Kyoko Kuroki, Takahiro Matsuura
Proceedings Volume 6607, 660707 (2007) https://doi.org/10.1117/12.728920
KEYWORDS: Air contamination, Photomasks, Reticles, Pellicles, Atmospheric particles, Sulfur, Gases, Nitrogen, Semiconducting wafers, Semiconductors

Proceedings Article | 20 October 2006 Paper
Star Hoyeh, Richard Chen, Makoto Kozuma, Joann Kuo, Torey Huang, Frank Chen
Proceedings Volume 6349, 63492U (2006) https://doi.org/10.1117/12.686075
KEYWORDS: Ozone, Scanning probe microscopy, Photomasks, Ions, Hydrogen, Reflectivity, Manufacturing, Particles, Plasma, Photoresist processing

Proceedings Article | 20 October 2006 Paper
Frank Chen, Casper Lee, Jason Lin
Proceedings Volume 6349, 63493U (2006) https://doi.org/10.1117/12.685916
KEYWORDS: Databases, Computing systems, Error control coding, Photomasks, Data storage, Lithium, Computed tomography, Data archive systems, Manufacturing, Data storage servers

Proceedings Article | 20 October 2006 Paper
Jerry Lu, Boster Wang, Frank Chen, Orion Wang, Jomarch Chou, Orson Lin, Jackie Cheng, Ellison Chen, Paul Yu
Proceedings Volume 6349, 63493K (2006) https://doi.org/10.1117/12.685660
KEYWORDS: Inspection, Photomasks, Defect detection, Quartz, Semiconducting wafers, Reticles, Lithography, Chromium, Resolution enhancement technologies, Manufacturing

Showing 5 of 7 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top