Dr. Feng Cui
at Shanghai Jiao Tong Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Actuators, Microfluidics, Silicon, Magnetism, Throat, Silicon films, Diffusers, Semiconducting wafers, Bromine, Electromagnetism

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Electrodes, Glasses, Nickel, Silicon, Capacitance, Micromachining, Gyroscopes, Structural design, Semiconducting wafers, Signal detection

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