Dr. Feng Cui
at Shanghai Jiao Tong Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 December 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Magnetism, Silicon, Diffusers, Actuators, Semiconducting wafers, Electromagnetism, Microfluidics, Silicon films, Throat, Bromine

Proceedings Article | 30 December 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Electrodes, Gyroscopes, Signal detection, Nickel, Capacitance, Glasses, Structural design, Semiconducting wafers, Micromachining, Silicon

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